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Note: the values highly depend on deposition conditions. 5n 5k 5L 5Ref 5CoSi2 5=M.R. Baklanov, J. Vac. Sci. Technol, vol. 16 nr.1, 164 (1998) 5TiSi2 5" 5WSi2.2 5EH. G. Tompkins, A User's Guide to Ellipsometry, Academic Press, 1993. 5W 5Ni 5Al 5Au 5Al2O3 5TiN 5TiO2 5Si3N4 5poly Si 5 amorphous Si 5Si 5Rudolf, AutoEL MS Manual 5t-SiO2 5 Si (fitting) 5$Based on, CRC Handbook Chem. & Phys. 5 fused silica 5n2 5k2 5 Medium 1 vol% 5n 5k 5Medium 2 (rest) 5 (Bruggeman Effective Medium Approximation 5B 5 C 5 N1 5 N2 5 F1 5 F2 5 n.a. 5 b1 5 b2 5 SQR 5N 5rad(psi) 5rad(del) 5 rad(phai) 5A 5B 5USE "ANALYSIS TOOL" ADD-IN 5 2http://www.ccn.yamanashi.ac.jp/~kondoh/ellips.html 5 Angle (phi1) 5 Period 5 N1 5 N2 5 phai1 5 cos(phi1) 5 cos(phi2) 5 cos(phi3) 5 rp12 5 rs12 5 rp23 5 beta 5 Rp 5 Rs 5 Psi 5 Del 5 4ELLIPSHEET, E. 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