Kawasaki Steel Corporation, LSI Research Center
Kawasaki 1, Chuo, Chiba 260, Japan
The chemical vapor-deposited homoepitaxial (111) diamond surf ace is studied by reflection high-energy electron diffraction (RHE ED). The obtained diffraction patterns showed the presence of anti -phase domain ordering of 2x1 surface unit cells. The anti-phase b oundary was determined to be <110>.
Japanese Journal of Applied Physics, 32 (1993) L947