$B;HMQNc$G$7$a$7$?7W;;$N7k2L!#%$%*%s?t(B8698$B8D(B
(I[[[[[[(B P (120 keV) into SiO2+Silicon
(I[[[[[[[(B
TRIM : SRIM-98 (98.01)
(IIMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM;(B
(I:(B ION and final RECOIL ATOM Distributions (I:(B
(IHMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM<(B
(IZDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDD?(B
(I3(B Recoil/Damage Calculations made with Kinchin-Pease Estimates
(I3(B
(I@DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDY(B
(IZDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDD?(B
(I3(B There are NO RECOILS unless a full TRIM calculation is made.
(I3(B
(I@DDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDDY(B
See file : TDATA.TXT for data about the calculation
Ion = P Energy = 120 keV
(IMMMMMMMMMMMMM(B TARGET MATERIAL
(IMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM(B
Layer 1 : SiO2
Layer Width = 1000.E+00 A ;
Layer # 1- Density = 5.183E22 atoms/cm3 = 1.724 g/cm3
Layer # 1- Si = 33.3 Atomic Percent = 46.7 Mass Percent
Layer # 1- O = 66.6 Atomic Percent = 53.2 Mass Percent
Layer 2 : Silicon $B#s(B
Layer Width = 5000.E+00 A ;
Layer # 2- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
Layer # 2- Si = 100 Atomic Percent = 100 Mass Percent
(IMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM(B
Total Ions calculated = 8698.00
Ion Average Range = 19146.E-01 A Straggling = 56200.E-02 A $B?bD>J}8~$NJ?6QEj1F$HI8=`JP:9&$(BRp
Ion Lateral Range = 40617.E-02 A Straggling = 51243.E-02 A
Ion Radial Range = 64044.E-02 A Straggling = 34821.E-02 A
(IMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM(B
Range Skewness = -0.2144 = [$B!&(BX-Rp)^3]/[N*Straggle^3]
Range Kurtosis = 2.8448 = [$B!&(BX-Rp)^4]/[N*Straggle^4]
Statistical definitions above are those used in VLSI implant
modelling.
(IMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM(B
(IIMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM;(B
(I:(B Table Distribution Units are >>> Atoms / Angstrom /
Ion <<< (I:(B
(IHMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMMM<(B
DEPTH P Recoil
(Ang.) Ions Distribution
----------- ---------- ------------
60010.E-0300.000E-01 00.000E-01$B!!!!!!(B$B%+%i%`:8C<$O?<$5"r!"??Cf$O"r$"$?$j$N%$%*%sG;EY(B
12001.E-02 57.484E-07 00.000E-01$B!!!!(B$B!JA4%$%*%s?t$G5,3J2=$5$l$F$$$k!K!#1&C<$O7W;;$5$l$F$$$J$$!#(B
18001.E-02 11.497E-06 00.000E-01
24001.E-02 19.161E-06 00.000E-01
30001.E-02 19.161E-06 00.000E-01
36001.E-02 17.245E-06 00.000E-01
42001.E-02 34.491E-06 00.000E-01
48001.E-02 40.239E-06 00.000E-01
54001.E-02 45.988E-06 00.000E-01
60001.E-02 45.988E-06 00.000E-01
66001.E-02 61.317E-06 00.000E-01
72001.E-02 88.143E-06 00.000E-01
78001.E-02 82.394E-06 00.000E-01
84001.E-02 91.975E-06 00.000E-01
90001.E-02 10.730E-05 00.000E-01
96001.E-02 12.838E-05 00.000E-01
10200.E-01 12.647E-05 00.000E-01
10800.E-01 22.611E-05 00.000E-01
11400.E-01 26.443E-05 00.000E-01
12000.E-01 33.533E-05 00.000E-01
12600.E-01 42.922E-05 00.000E-01
13200.E-01 38.131E-05 00.000E-01
13800.E-01 39.281E-05 00.000E-01
14400.E-01 47.137E-05 00.000E-01
15000.E-01 48.862E-05 00.000E-01
15600.E-01 53.269E-05 00.000E-01
16200.E-01 59.018E-05 00.000E-01
16800.E-01 52.694E-05 00.000E-01
17400.E-01 59.401E-05 00.000E-01
18000.E-01 61.125E-05 00.000E-01
18600.E-01 69.173E-05 00.000E-01
19200.E-01 65.149E-05 00.000E-01
19800.E-01 64.958E-05 00.000E-01
20400.E-01 70.898E-05 00.000E-01
21000.E-01 70.323E-05 00.000E-01
21600.E-01 64.383E-05 00.000E-01
22200.E-01 62.467E-05 00.000E-01
22800.E-01 63.233E-05 00.000E-01
23400.E-01 65.341E-05 00.000E-01
24000.E-01 56.910E-05 00.000E-01
24600.E-01 51.353E-05 00.000E-01
25200.E-01 50.778E-05 00.000E-01
25800.E-01 37.748E-05 00.000E-01
26400.E-01 39.281E-05 00.000E-01
27000.E-01 35.066E-05 00.000E-01
27600.E-01 25.676E-05 00.000E-01
28200.E-01 22.036E-05 00.000E-01
28800.E-01 19.545E-05 00.000E-01
29400.E-01 13.988E-05 00.000E-01
30000.E-01 12.455E-05 00.000E-01
30600.E-01 91.975E-06 00.000E-01
31200.E-01 67.065E-06 00.000E-01
31800.E-01 42.155E-06 00.000E-01
32400.E-01 28.742E-06 00.000E-01
33000.E-01 21.078E-06 00.000E-01
33600.E-01 57.484E-07 00.000E-01
34200.E-01 76.646E-07 00.000E-01
34800.E-01 76.646E-07 00.000E-01
35400.E-01 11.497E-06 00.000E-01
36000.E-01 19.161E-07 00.000E-01
36600.E-01 19.161E-07 00.000E-01
37200.E-01 19.161E-07 00.000E-01
37800.E-01 00.000E-01 00.000E-01
38400.E-01 00.000E-01 00.000E-01
39000.E-01 00.000E-01 00.000E-01
39600.E-01 00.000E-01 00.000E-01
40200.E-01 00.000E-01 00.000E-01
40800.E-01 00.000E-01 00.000E-01
41400.E-01 00.000E-01 00.000E-01
42000.E-01 00.000E-01 00.000E-01
42600.E-01 00.000E-01 00.000E-01
43200.E-01 00.000E-01 00.000E-01
43800.E-01 00.000E-01 00.000E-01
44400.E-01 00.000E-01 00.000E-01
45000.E-01 00.000E-01 00.000E-01
45600.E-01 00.000E-01 00.000E-01
46200.E-01 00.000E-01 00.000E-01
46800.E-01 00.000E-01 00.000E-01
47400.E-01 00.000E-01 00.000E-01
48000.E-01 00.000E-01 00.000E-01
48600.E-01 00.000E-01 00.000E-01
49200.E-01 00.000E-01 00.000E-01
49800.E-01 00.000E-01 00.000E-01
50400.E-01 00.000E-01 00.000E-01
51000.E-01 00.000E-01 00.000E-01
51600.E-01 00.000E-01 00.000E-01
52200.E-01 00.000E-01 00.000E-01
52800.E-01 00.000E-01 00.000E-01
53400.E-01 00.000E-01 00.000E-01
54000.E-01 00.000E-01 00.000E-01
54600.E-01 00.000E-01 00.000E-01
55200.E-01 00.000E-01 00.000E-01
55800.E-01 00.000E-01 00.000E-01
56400.E-01 00.000E-01 00.000E-01
57000.E-01 00.000E-01 00.000E-01
57600.E-01 00.000E-01 00.000E-01
58200.E-01 00.000E-01 00.000E-01
58800.E-01 00.000E-01 00.000E-01
59400.E-01 00.000E-01 00.000E-01
60000.E-01 00.000E-01 00.000E-01
$B$3$N%G!<%?$r85$K!"BG$A9~$_NL$r#1(BE15 ions/cm2$B$H$7$FIA$$$?G;EY%W%m%U%!%$%k(B
$B!!(B