{"text_format":"3","workbook":"xls","n_sheets":4,"sheets":["Single Layer","Substrate Calculation","Effective Medium","Optical Properties"],"not_rendered":{"external_links":2},"read":"whole","date_system":"1900","formulas":"cached_only"}

{"sheet":"Single Layer","index":0,"n_rows":7,"n_cols":30,"rows_kept":7,"flags":["formulas_cached_only"]}
["ELLIPSHEET, E. Kondoh Mar. 1999; Final Rev May. 2001"]
["USE \"ANALYSIS TOOL\" ADD-IN",{"$nulls":7},"http://www.ccn.yamanashi.ac.jp/~kondoh/ellips.html"]
[]
[]
["Environment",null,"Film1",null,"Substrate"]
["n1","k1","n2","k2","n3","k3","Angle (phi1)","L (A)","Period","Film thickness (A)","N1","N2","N3","phai1","cos(phi1)","cos(phi2)","cos(phi3)","rp12","rs12","rp23","rs23","beta","Rp","Rs","Psi","Del",null,null,"PSI","DELTA"]
[1,0,1.46,0,3.85,-0.02,70,6330,2832.47388028616,0,"1","1.46","3.85-2E-002i","1.22173047639603","0.34202014332567","0.765340938981253","0.969758644260474-3.19104068282549E-004i","-0.210321467303541","-0.531292387206063","0.350895161110856-2.13330669701068E-003i","-0.539317135311373+1.95857970300021E-003i","0","0.151773641268732-2.37681536395645E-003i","-0.832165726396759+8.49293549261082E-004i",0.18042262374254897,3.12695425098365,0,0,10.337454869124898,179.16128131185468]

{"sheet":"Substrate Calculation","index":1,"n_rows":6,"n_cols":12,"rows_kept":6,"flags":["formulas_cached_only"]}
["To determine N and K for an unknown substrate"]
["USE \"ANALYSIS TOOL\" ADD-IN"]
[]
[]
["n1","k1","PSI","DELTA","Angle (phai1)","rad(psi)","rad(del)","rad(phai)","A","B","n3","k3"]
[1,"(n.a.)",10.34,179.1,70,0.18046704465621366,3.1258846903218442,1.2217304763960306,14.824435218212608,0.16532408195973414,3.850311173521433,-0.02146892478414042]

{"sheet":"Effective Medium","index":2,"n_rows":5,"n_cols":18,"rows_kept":5,"flags":["formulas_cached_only"]}
["Bruggeman Effective Medium Approximation"]
["USE \"ANALYSIS TOOL\" ADD-IN"]
[]
["n1","k1","Medium 1 vol%","n2","k2","Medium 2 (rest)","N1","N2","F1","F2","b1","b2","B","C","SQR","N","n","k"]
[3.85,-0.02,100,1,0,"n.a.","3.85-2E-002i","1",1,0,2,-1,"28.6442-0.308i","14.8221-0.154i","30.6442-0.308i","3.85-2E-002i",3.85,-0.02]

{"sheet":"Optical Properties","index":3,"n_rows":119,"n_cols":7,"rows_kept":119,"flags":["formulas_cached_only"]}
[]
[null,"Guide Values of N and K for various materials. Note: the values highly depend on deposition conditions."]
[]
[null,null,"n","k","L",null,"Ref"]
[null,"CoSi2",2.15,-1.45,6330,null,"M.R. Baklanov, J. Vac. Sci. Technol, vol. 16 nr.1, 164 (1998)"]
[null,"TiSi2",2.85,-2.7,6330,null,"\""]
[null,"WSi2.2",4.25,-1.37,6330,null,"H. G. Tompkins, A User's Guide to Ellipsometry, Academic Press, 1993."]
[null,"W",3.41,-2.63,6330,null,"\""]
[null,"Ni",2.01,-3.75,6330,null,"\""]
[null,"Al",1.21,-6.92,6330,null,"\""]
[null,"Au",0.16,-3.21,6330,null,"\""]
[null,"Al2O3",1.77,0,6330,null,"\""]
[null,"TiN",1.39,-1.76,6330,null,"\""]
[null,"TiO2",2.2,0,6330,null,"\""]
[null,"Si3N4",2.021,0,6330,null,"\""]
[null,"poly Si",4,-0.035,6330,null,"\""]
[null,"amorphous Si",4.3,-0.192,6330,null,"\""]
[]
[null,"Si",6.548,-2.672,3650,null,"Rudolf, AutoEL MS Manual"]
[null,null,5.42,-0.329,4050]
[null,null,4.841,-0.184,4358]
[null,null,4.05,-0.028,5461]
[null,null,3.858,-0.018,6328]
[null,null,3.702,-0.007,7900]
[null,null,3.762,-0.005,8300]
[null,null,3.644,-0.005,8500]
[]
[null,"t-SiO2",1.478,null,3650,null,"Rudolf, AutoEL MS Manual"]
[null,null,1.47,null,4050]
[null,null,1.467,null,4358]
[null,null,1.462,null,5461]
[null,null,1.46,null,6328]
[null,null,1.456,null,7900]
[null,null,1.455,null,8300]
[null,null,1.455,null,8500]
[]
[null,"Si (fitting)",5.57,-0.3861,4000,null,"Based on, CRC Handbook Chem. & Phys."]
[null,null,5.306,-0.2973,4100]
[null,null,5.064,-0.2227,4200]
[null,null,4.927,-0.1964,4300]
[null,null,4.781,-0.1684,4400]
[null,null,4.677,-0.1483,4500]
[null,null,4.576,-0.1279,4600]
[null,null,4.485,-0.096,4700]
[null,null,4.422,-0.0871,4800]
[null,null,4.35,-0.0767,4900]
[null,null,4.299,-0.0704,5000]
[null,null,4.242,-0.0634,5100]
[null,null,4.201,-0.0581,5200]
[null,null,4.16,-0.0528,5300]
[null,null,4.12,-0.0473,5400]
[null,null,4.087,-0.0408,5500]
[null,null,4.054,-0.0342,5600]
[null,null,4.024,-0.0315,5700]
[null,null,3.997,-0.0307,5800]
[null,null,3.97,-0.03,5900]
[null,null,3.948,-0.0273,6000]
[null,null,3.927,-0.0246,6100]
[null,null,3.906,-0.0219,6200]
[null,null,3.888,-0.0201,6300]
[null,null,3.87,-0.0183,6400]
[null,null,3.851,-0.0162,6500]
[null,null,3.836,-0.0153,6600]
[null,null,3.822,-0.0145,6700]
[null,null,3.805,-0.0136,6800]
[null,null,3.795,-0.0129,6900]
[null,null,3.784,-0.0121,7000]
[null,null,3.773,-0.0114,7100]
[null,null,3.757,-0.0104,7200]
[null,null,3.75,-0.0099,7300]
[null,null,3.742,-0.0095,7400]
[null,null,3.734,-0.009,7500]
[null,null,3.726,-0.0086,7600]
[null,null,3.718,-0.0082,7700]
[null,null,3.71,-0.0076,7800]
[null,null,3.702,-0.0071,7900]
[null,null,3.694,-0.0065,8000]
[]
[null,"fused silica",1.4700382636655949,null,4000,null,"Based on, CRC Handbook Chem. & Phys."]
[null,null,1.4691057877813505,null,4100]
[null,null,1.468173311897106,null,4200]
[null,null,1.4672408360128617,null,4300]
[null,null,1.4663849999999998,null,4400]
[null,null,1.465635,null,4500]
[null,null,1.464885,null,4600]
[null,null,1.464155737704918,null,4700]
[null,null,1.4635,null,4800]
[null,null,1.4629016,null,4900]
[null,null,1.4623416,null,5000]
[null,null,1.4617942933333332,null,5100]
[null,null,1.46132496,null,5200]
[null,null,1.4608556266666666,null,5300]
[null,null,1.4603862933333334,null,5400]
[null,null,1.4599458795180722,null,5500]
[null,null,1.4595506987951807,null,5600]
[null,null,1.4591555180722893,null,5700]
[null,null,1.4587603373493976,null,5800]
[null,null,1.4583824778761063,null,5900]
[null,null,1.4580594690265487,null,6000]
[null,null,1.4577364601769913,null,6100]
[null,null,1.4574134513274337,null,6200]
[null,null,1.4570904424778761,null,6300]
[null,null,1.4568054054054056,null,6400]
[null,null,1.4565376612903227,null,6500]
[null,null,1.4562734782608695,null,6600]
[null,null,1.4560177002583978,null,6700]
[null,null,1.4557799741602067,null,6800]
[null,null,1.4555422480620155,null,6900]
[null,null,1.4553045219638243,null,7000]
[null,null,1.4550787854889589,null,7100]
[null,null,1.4548753154574132,null,7200]
[null,null,1.4546718454258674,null,7300]
[null,null,1.4544683753943217,null,7400]
[null,null,1.4542649053627759,null,7500]
[null,null,1.4540614353312302,null,7600]
[null,null,1.453858118811881,null,7700]
[null,null,1.45367,null,7800]
[null,null,1.4534943243243243,null,7900]
[null,null,1.453324694589878,null,8000]