Professor
Department of Mechanical System Eng.
Faculty of Engineering
University of Yamanashi

[Japanese]

Materials and Processing for Micro-integrated Systems
Nano and Micro Fabrication, Materials Science in Thin Films, Electronic Materials

Current Main Subject: Micro and Nano Processing using supercritical fluids

Publication List (not latest)

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Reprints

Undergraduates:
Electronic Devices
Near-net-shape processing
Micro-nano Processing
Human, Machines and Robots (art subject)
Seminar for Mechanical System Engineering II, etc.

Graduates:
Materials Science for Microtechnolgoy (in M.S. program)
Ultra-Small-Scale Integration Systems (in Ph.D. program)

SEMI STS2004, Metallization using Supercritical Carbon Dioxide Fluids

Spreadsheet Ellipsometry

BMC for Windows (WinBB): A LaTeX utility for bounding box file generation

Link to TRIM Home Page

Link to ADMETA

Takeda, Kofu 400-8511, Japan.