査読付き論文:
[39] Yuya Kobayashi, Takumi Iizawa, Masashi Suzuki, Shoji Kakio, Noritoshi Kimura
Analysis of longitudinal leaky surface acoustic wave resonance properties on LiNbO3/Ca3TaGa3Si2O14 bonded structures
JAPANESE JOURNAL OF APPLIED PHYSICS, 2025年3月
[38] K. Fukunaga, M. Suzuki, S. Kakio
High-overtone mode bulk acoustic wave resonators based on polarization inverted multilayer SiAlN/ScAlN films
JAPANESE JOURNAL OF APPLIED PHYSICS, 2025年1月
[37] K. Fukunaga, M. Suzuki, S. Kakio
Analysis of Sezawa mode Rayleigh-type SAWs on ScAlN film/floated electrode layer/ScAlN film/high velocity substrates
JAPANESE JOURNAL OF APPLIED PHYSICS, 2024年2月
[36] H. Morita, M. Suzuki, S. Kakio, J. Mizuno
Resonance analysis of longitudinal leaky surface acoustic wave third harmonic on LiNbO3/quartz bonded structure
JAPANESE JOURNAL OF APPLIED PHYSICS, 2024年2月
[35] N. Hara, M. Suzuki, S. Kakio, Y. Yamamoto
Analysis of longitudinal leaky surface acoustic waves on piezoelectric thin plates bonded to diamond substrate
JAPANESE JOURNAL OF APPLIED PHYSICS, 2023年4月
[34] J. Sekimoto, M. Suzuki, S. Kakio,
High-order mode solid mounted resonators with polarity inverted multilayered GeAlN/AlN films
JAPANESE JOURNAL OF APPLIED PHYSICS, 2023年4月
[33] M. Suzuki, J. Sekimoto, S. Kakio
Characteristics of c-axis oriented GeAlN films and applications to higher-order mode BAW resonators
JAPANESE JOURNAL OF APPLIED PHYSICS, 2023年4月
[32] Y. Fujii, M. Suzuki, S. Kakio
Analysis of longitudinal leaky surface acoustic waves on bonded structures consisting of similar and dissimilar materials
JAPANESE JOURNAL OF APPLIED PHYSICS, 2023年4月
[31] T. Suzuki, M. Suzuki, S. Kakio
Analysis of surface acoustic wave resonance properties on piezoelectric substrates with periodic voids
JAPANESE JOURNAL OF APPLIED PHYSICS, 2023年4月
[30] R. Suzuki, M. Suzuki, S. Kakio and N. Kimura,
Resonance properties of shear-horizontal surface acoustic waves on Ca3TaGa3Si2O14 at room and high temperatures
JAPANESE JOURNAL OF APPLIED PHYSICS, 2023年4月
[29] J. Sekimoto, M. Suzuki, S. Kakio,
High-order mode bulk acoustic wave resonators based on polarity-inverted SiAlN/AlN multilayered films for high-frequency operation
Applied Physics Letters, 121, 2022.
[28] J. Jia, N. Iwata, M. Suzuki, T. Yanagitani,
Enhanced Electromechanical Coupling in Yb-Substituted III–V Nitride Alloys,
ACS Applied Electronic Materials, 4, p. 3448, 2022.
[27] K. Yoshizawa, M. Suzuki, S. Kakio, Y. Ito, Ak. Tateyama, T. Shiraishi, H. Funakubo, T. Wakabayashi, K. Shibata,
Evaluation of bulk and surface acoustic waves propagation properties of (K, Na) NbO3 films deposited by hydrothermal synthesis or RF magnetron sputtering methods,
Japanese Journal of Applied Physics, 61 p. SG1077, 2022.
[26] K. Matsuura, M. Suzuki, S. Kakio, M. Kodera, H. Funakubo,
Deposition and evaluation of Ta2O5 piezoelectric thin film on Pt crystal film,
Japanese Journal of Applied Physics, 61 p. SG1076, 2022.
[25] Y. Takano, M. Suzuki, S. Kakio,
Enhancement of coupling factor in 0th to 4th mode Rayleigh surface acoustic waves on polarity inverted multilayered ScAlN film/AlN and BN substrates,
Japanese Journal of Applied Physics, 61 p. SG1059, 2022.
[24] Y. Fujii, T. Fujimaki, M. Suzuki, S. Kakio,
Analysis of longitudinal leaky surface acoustic waves on quartz thin plate bonded to similar-material substrate,
Japanese Journal of Applied Physics, 61 p. SG1052, 2022.
[23] M. Suzuki, S. Kakio,
"Analysis of propagation characteristics of Rayleigh surface acoustic waves on Yb0. 33Al0. 67N piezoelectric films/high-velocity substrates,"
Japanese Journal of Applied Physics, 61 p. SG1014, 2022.
[22] T. Fujimaki, M. Suzuki, S. Kakio,
Analysis of leaky surface acoustic waves on quartz thin plates bonded to similar-material substrate dissimilar-material structures,
Japanese Journal of Applied Physics, 60 p. SDDC04, 2021.
[21] S. Asakawa, M. Suzuki, S. Kakio, A. Tezuka, J. Mizuno,
Enhancement of leaky surface acoustic wave harmonics excitation using bonded dissimilar-material structures,
Japanese Journal of Applied Physics, 60 p. SDDC07, 2021.
[20] Y. Takano, R. Hayakawa, M. Suzuki, S. Kakio,
Increase of electromechanical coupling coefficient kt 2 in (0001)-oriented AlN films by chromium doping,
Japanese Journal of Applied Physics, 60 p. SDDC08, 2021.
[19] M. Suzuki and S.kakio,
Analysis of leaky surface acoustic wave characteristic propagating on high piezoelectric ScAlN film / high velocity quartz substrate,
Japanese Journal of Applied Physics, 59 p. SKKC07, 2020.
[18] S. Asakawa, J. Hayashi, M. Suzuki, S. Kakio, A. Tezuka, H. Kuwae, H. Yokota, T. Yonai, K. Kishida, J. Mizuno,
Analysis of longitudinal leaky surface acoustic waves on LiNbO3/amorphous layer/quartz structure,
Japanese Journal of Applied Physics, 59 p. SKKC12, 2020.
[17] S. Kakio, Y. Kato, R. Suenaga, M. Suzuki, A. Tezuka, H. Kuwae, H. Yokota, T. Yonai, K. Kishida, and J. Mizuno,
Propagation properties of leaky surface acoustic wave on waterloaded LiTaO3/quartz bonded structure,
Japanese Journal of Applied Physics, 59 p. SKKC04, 2020.
[16] T. Fujimaki, M. Suzuki, and S. Kakio,
Analysis of leaky surface acoustic waves on LiNbO3 or LiTaO3 thin plate bonded to similar-material substrates,
Japanese Journal of Applied Physics, 59 p. SKKC01, 2020.
[15] J. Hayashi, K. Yamaya, S. Asakawa, M. Suzuki, S. Kakio, A. Tezuka, H. Kuwae, H. Yokota, T. Yonai, K. Kishida, J. Mizuno,
Longitudinal leaky surface acoustic wave with low attenuation on LiTaO3 or LiNbO3 thin plate bonded to quartz substrate,
Japanese Journal of Applied Physics, 58, p. SGGC12, 2019年7月.
[14] K. Hakiri, M. Suzuki, and S. Kakio,
Acousto-optic modulators driven by longitudinal leaky surface acoustic waves on LiNbO3 thin-plate bonded structures,
Japanese Journal of Applied Physics, 58, p. SGGA09, 2019年7月.
[13] M. Suzuki, N. Sawada, and S. Kakio,
Analysis of longitudinal leaky surface acoustic wave propagation characteristics on a piezoelectric ScAlN layer/sapphire or quartz substrate,
Japanese Journal of Applied Physics, 58, p. SGGC08, 2019年7月.
[12] R. Suenaga, M. Suzuki, S. Kakio, Y. Ohashi, M. Arakawa, and J. Kushibiki,
Evaluation of SiO2 Thin films on piezoelectric substrates using line-focus-beam ultrasonic material characterization system,
Japanese Journal of Applied Physics, 58, p. SGGA05, 2019年7月.
[11] M. Kawabe, S. Takayanagi, H. Ichihashi, M. Suzuki, T. Yanagitani and M. Matsukawa,
Rapid wave velocity measurement by Brillouin scattering using coherent phonons induced by ScAlN piezoelectric thin-film transducer,
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 65, p. 1882, 2018年7月.
[10] J. Hayashi, K. Yamaya, M. Suzuki, S. Kakio, H. Suzaki, T. Yonai, K. Kishida and Jun Mizuno,
High coupling and highly stable leaky surface acoustic waves on LiTaO3 thin plate bonded to quartz substrate,
Japanese Journal of Applied Physics, 57, p. 07LD21, 2018年7月.
[9] R. Suenaga, M. Suzuki, S. Kakio, Y. Ohashi, M. Arakawa and J. Kushibiki,
Propagation properties of leaky surface acoustic wave on water-loaded piezoelectric substrate,
JapaneseJournal of Applied Physics, 57, p. 07LC10, 2018年7月.
[8] K. Hakiri, M. Suzuki and S. Kakio,
Acousto-optic Bragg diffraction using longitudinal leaky surface acoustic wave,
Japanese Journal of Applied Physics, 57, p. 07LD01, 2018年7月.
[7] Y. Hiramatsu, M. Suzuki and S. Kakio,
Double-diffraction waveguide-type acousto-optic modulator with interchangeable input and output ports
Japanese Journal of Applied Physics, 57, p. 07LD16, 2018年7月.
[6] M. Suzuki, M. Gomi, and S. Kakio,
Propagation characteristics of longitudinal-type leaky surface acoustic wave on layered structure consisting of ScxAl1-xN film / LiNbO3 substrate,
Japanese Journal of Applied Physics, 57, p.07LD06, 2018年7月.
[5] H．Ichihashi,T. Yanagitani, M. Suzuki, S．Takayanagi, M．kawabe, S．Tomita and M．Matsukawa
Acoustic wave velocities and refractive indices in an m-plane GaN single crystal plate and c-axis oriented ScAlN films measured by Brillouin scattering tecnique
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2016年3月
[4] T. Yanagitani and M. Suzuki
Electromechanical coupling and gigahertz elastic properties of ScAlN films near phase boundary
Applied Physics Letters, 2014年9月
[3] M. Suzuki, T. Yanagitani, and H. Odagawa
Polarity-inverted ScAlN film growth by ion beam irradiation and application to overtone acoustic wave (000-1)/(0001) film resonators
Applied Physics Letters, 2014年5月
[2] T. Yanagitani and M. Suzuki
Enhanced piezoelectricity in YbGaN films near phase boundary
Applied Physics Letters, 2014年2月
[1] T. Yanagitani and M. Suzuki,
Significant shear mode softening in a c-axis tilt nanostructured hexagonal thin film induced by a self-shadowing effect
Scripta Materialia, 2013年8月
国際会議論文:
[25] M. Suzuki, J. Sekimoto, S. Kakio, "High Overtone Mode Solid Mounted Resonators with Polarity Inverted Multilayered SiAlN/AlN Films," Proc. 2023 IEEE Ultrason. Symp. 2023.
[24] H. Morita, M. Suzuki, S. Kakio, J. Mizuno, "Resonance Properties of Leaky SAW Higher Harmonics on LiTaO3 Thin Plate Bonded to Quartz Substrate," Proc. 2023 IEEE Ultrason. Symp. 2023.
[23] N. Hara, M. Suzuki, S. Kakio, Y. Yamamoto, "Suppression of Spurious Propagation Modes on Plate Waves and SAWs Using Divided Piezoelectric Thin Plates," Proc. 2023 IEEE Ultrason. Symp. 2023.
[22] T. Suzuki, M. Suzuki, S. Kakio, "Analysis of SAW Propagation Properties on Piezoelectric Substrate with Periodic Voids," Proc. 2023 IEEE Ultrason. Symp. 2023.
[21] K. Matsuura, M. Suzuki, S. Kakio, M. Kodera, H. Funakubo, "Deposition and Evaluation of Highly Crystallized Ta2O5 Piezoelectric Thin Film on Pt Crystal Film," 2022 IEEE International Ultrasonics Symposium proceedings, 2022.
[20] Y. Fujii, M. Suzuki, S. Kakio, "Analysis of Longitudinal Leaky SAWs on Bonded Structures Consisting of Similar and Dissimilar Materials," 2022 IEEE International Ultrasonics Symposium proceedings, 2022.
[19] Y. Koike, J. Jia, M. Suzuki, T. Yanagitani, "Experimental and theoretical investigation of kt2 and velocity in YbGaN films by DFT," 2021 IEEE International Ultrasonics Symposium proceedings, 2021.
[18] J. Sekimoto, M. Suzuki, S. Kakio, "Polarity control of (0001) oriented AlN films by Si doping and applications to polarity inverted SiAlN/AlN film bulk acoustic wave resonators," 2021 IEEE International Ultrasonics Symposium proceedings, 2021.
[17] K. Yoshizawa, M. Suzuki, S. Kakio, Y. Ito, A. Tateyama, H. Funakubo, T. Wakabayashi, K. Shibata, "Evaluation of BAW and SAW Properties of (K, Na)NbO3 Thin Films Deposited by RF Sputtering," 2021 IEEE International Ultrasonics Symposium proceedings, 2021.
[16] Y. Takano, M. Suzuki, S. Kakio, "Analysis of higher-order mode SAW propagation characteristics on polarity inverted ScAlN films/high velocity III-V nitride substrate," 2021 IEEE International Ultrasonics Symposium proceedings, 2021.
[15] T. Fujimaki, M. Suzuki, S. Kakio ,"Leaky SAW Propagation Properties on LiNbO3 Thin Plate Bonded to Similar-Material Substrate," 2020 IEEE International Ultrasonics Symposium, 2020.
[14] N. Iwata, S. Kinoshita, J. Jia, M. Suzuki, T. Yanagitani, "Experimental and theoretical investigation of kt2 and mechanical quality factor Qm in YbAlN films using DFT," 2020 IEEE International Ultrasonics Symposium, 2020.
[13] S. Asakawa, M. Suzuki, S. Kakio, A. Tezuka, J. Mizuno, "Resonance Properties of Leaky SAW Harmonics on Bonded Dissimilar-Material Structures,"2020 IEEE International Ultrasonics Symposium, 2020.
[12] M. Suzuki and S. Kakio, “Electromechanical Coupling Coefficient kt2 of Cr doped AlN Films Grown by Sputtering Deposition,” 2019 IEEE Ultrasonics Symp. Proceedings, 2019年10月.
[11] S. Asakawa, J. Hayashi, M. Suzuki, S. Kakio, A. Tezuka, H. Kuwae, H. Yokota, T. Yonai, K. Kishida, J. Mizuno, “Analysis of Longitudinal Leaky SAW on LiNbO3 Thin Plate/Amorphous Layer/Quartz Structure, “2019 IEEE Ultrasonics Symp. Proceedings 2019年10月.
[10] R. Suenaga, M. Suzuki, S. Kakio, Y. Ohashi, M. Arakawa, J. Kushibiki, “Evaluation of Piezoelectric Ta2O5 Thin Films Using Line-Focus-Beam Ultrasonic Material Characterization System,” 2018 IEEE Ultrasonics Symp. Proceedings, 2018年9月.
[9] H. Igeta, M. Totsuka, M. Suzuki, N. Hiroshiba, T. Yanagitani, ”Temperature characteristics of ScAlN/SiO2 BAW resonators,” 2018 IEEE Ultrasonics Symp. Proceedings, 2018年9月.
[8] J. Hayashi, K. Yamaya, S. Asakawa, M. Suzuki, S. Kakio, H. Kuwae, T. Yonai, K. Kishida, J. Mizuno, “Longitudinal Leaky Surface Acoustic Wave with Low Attenuation on LiTaO3 Thin Plate Bonded to Quartz Substrate,” 2018 IEEE Ultrasonics Symp. Proceedings , 2018年9月.
[7] K. Hakiri, M. Suzuki, S. Kakio., ”Acousto-Optic Modulators Driven by Longitudinal Leaky Surface Acoustic Waves on Bonded Structures,” 2018 IEEE Ultrasonics Symp. Proceedings , 2018年9月.
[6] M. Suzuki and S. Kakio, “Theoretical analysis and design of longitudinal leaky SAW device consisting of ScAlN film / piezoelectric single crystal,” 2018 IEEE Ultrasonics Symp. Proceedings , 2018年9月.
[5] M. Kawabe, T. Yanagitani, H. Ichihashi, S. Takayanagi, M. Suzuki, and M. Matsukawa, "Fast wave velocity measurement by brillouin scattering using coherent induced phonon from ScAlN piezoelectric thin film," Proc. 2015 IEEE Ultrason. Symp. 2015年
[4] M. Suzuki, T. Yanagitani, "Polarization inverted (0001)/(000-1) ScAIN film resonators operating in second overtone mode," Proc. 2012 IEEE Ultrason. Symp. 2012年
[3] M. Suzuki and T. Yanagitani,"c-axis parallel oriented A1N film resonator fabricated by ion-beam assisted RF magnetron sputtering," Proc. 2011 IEEE Ultrason. Symp. 2011年
[2] M. Suzuki and T. Yanagitani, "Polarization-inverted multilayered pure shear mode AlN film resonator," Proc. 2011 IEEE Ultrason. Symp 2011年
[1] M. Suzuki and T. Yanagitani, "Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films," Proc. 2010 IEEE Ultrason. Symp. 2010年
解説等：
{11} 鈴木雅視，関本淳，垣尾省司, "Si,Geドープによるc軸配向AlN膜の分極制御と分極反転SiAlN,GeAlN多層膜共振子への応用," 超音波TECHNO, 2023/7月号.
{10} 鈴木雅視，高野佑成，垣尾省司，"分極反転ScAlN薄膜/高音速AlN，w-BN基板上を伝搬する高次モードRSAWの結合係数K2増大," 超音波TECHNO, 2022/8月号.
{9} 鈴木雅視、髙野佑成、垣尾省司,"RFマグネトロンスパッタ法によるc軸配向CrAlN膜の形成と圧電特性評価," 超音波TECHNO, 2021/8月号.
{8} 高野佑成，早川竜盛，鈴木雅視，垣尾省司，“クロム添加c軸配向AlN薄膜の圧電特性評価,” 弾性波素子 技術第150委員会第160回研究資料, p. 9, 2020年3月.
{7} 鈴木雅視，早川竜盛，垣尾省司, “RFマグネトロンスパッタ法で形成したCr添加AlN膜の圧電特性,” 電気学 会研究会資料・電気回路研究会, ECT-18, p. 11, 2018年12月.
{6} 末永凌太，鈴木雅視，垣尾省司，大橋雄二，荒川元考，櫛引淳一，“圧電基板上に装荷したSiO2薄膜の直 線集束ビーム超音波材料解析システムによる評価，” 電気学会研究会資料・電気回路研究会, ECT-18, p. 21, 2018年12月.
{5} 浅川詩織，林純貴，鈴木雅視，垣尾省司，手塚彩水，桑江博之，米内敏文，岸田和人，水野潤, ”LiTaO3/ 水晶構造における縦型リーキーSAWの共振特性,” 電気学会研究会資料・電気回路研究会, ECT-18, p. 33, 2018年12月.
{4} 林純貴，浅川詩織，鈴木雅視，垣尾省司，手塚彩水，桑江博之，米内敏文，岸田和人，水野潤, ” LiTaO3/ 水晶構造上のリーキーSAW特性の解析―支持基板の物理定数依存性―,” 電気学会研究会資料・電気回路研 究会, ECT-18, p. 37, 2018年12月.
{3} 波切堅太郎，鈴木雅視，垣尾省司，“LiNbO3薄板接合構造上の縦型リーキー弾性表面波を用いた音響光学 変調素子,” 電気学会研究会資料・電気回路研究会, ECT-18, p. 53, 2018年12月.
{2} 柳谷隆彦, 鈴木雅視, 高柳真司, "非破壊検査用の高分解能超音波プローブ," 日本音響学会誌, 2015年5月
{1} 鈴木雅視, 柳谷隆彦, "c軸平行配向AIN薄膜を用いた極性反転すべり共振子," 超音波TECHNO, 2012年1月